SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.High purity chemical valve, stacking typeValve type: N.C., N.O., double actingOrifice diameter: ø4, ø8, ø12, ø20Port sizes: 1/4, 3/8, 1/2, 3/4Body material: PFAOptions: flow rate adjustment